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题  目:基于表面等离子共振成像方法的超薄液膜测量技术及器件结构优化研究
报告人:韩国中央大学 Seong Hyuk Lee 教授
时  间:2024-01-19 13:30
地  点:研发大厦西侧报告厅
题  目:Geometric Mid-infrared Metasurgace Photodetectors
报告人:仇成伟
时  间:2023-02-21 14:00
地  点:学术交流中心报告厅
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MICRO- AND NANO-STRUCTURATION OF SILICON ENABLES NOVEL METASURFACES WITH OPTO-FLUIDICS FUNCTIONALITIES
  2017-06-19 Tarik Bourouina
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内容简介Micro and Nano-structuration of single crystal silicon was already proven to be a powerful technology, enabling for instance the realization of 2D photonic band-gap materials (or photonic crystals). In this talk, we will make a review of different techniques of silicon micro- and nano-structuration, based on plasma processing, which include Deep Reactive Ion Etching (DRIE) and cryogenic plasma etching, leading either to structures with perfectly controlled shapes or randomly structured surfaces of the so-called Black Silicon, respectively. 

Silicon nano-patterning is also considered without the need for high-cost electron-beam or Deep-UV lithography. To this end, low-cost techniques are considered and they include self-assembly of nano-patterns and their subsequent transfer onto the underlying silicon. 

主讲人介绍: 

Tarik Bourouina holds M.Sc. in Physics, M.Eng. in Optoelectronics, Ph.D. in MEMS (1991), and HDR (2000) from Université Paris-Sud, Orsay. His entire career was devoted to the field of MEMS and Lab-On-Chip. He had several contributions in optical MEMS, among which the smallest MEMS-based FTIR Optical Spectrometer, Neospectra, jointly developed with Si-Ware-Systems, awarded the Prism award on photonics innovation in 2014.  

Professor Tarik BOUROUINA is now a Fellow of Chinese Academy of Sciences, visiting scientist at the Changchun Institute of Optics, Fine Mechanics and Physics (CIOMP), during the period from April 2017 to March 2018. 

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